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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II Softcover reprint of the original 1st ed. 2002 edition
Yves Pauleau
Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II Softcover reprint of the original 1st ed. 2002 edition
Yves Pauleau
Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001
363 pages, biography
Media | Books Paperback Book (Book with soft cover and glued back) |
Released | April 30, 2002 |
ISBN13 | 9781402005251 |
Publishers | Springer-Verlag New York Inc. |
Pages | 363 |
Dimensions | 160 × 240 × 20 mm · 603 g |
Language | English |
Editor | Pauleau, Y. |