Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies - NATO Science Series II 2002 edition

Yves Pauleau

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Proceedings of the NATO Advanced Study Institute, held in Kaunas, Lithuania, from 3-14 September 2001

363 pages, biography

Media	Books Hardcover Book (Book with hard spine and cover)
Released	April 30, 2002
ISBN13	9781402005244
Publishers	Springer-Verlag New York Inc.
Pages	363
Dimensions	155 × 235 × 22 mm · 748 g
Editor	Pauleau, Y.

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