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Handbook of Chemical Vapor Deposition: Principles, Technology and Applications 2nd edition
Pierson, Hugh O. (Sandia National Laboratories (retired))
Handbook of Chemical Vapor Deposition: Principles, Technology and Applications 2nd edition
Pierson, Hugh O. (Sandia National Laboratories (retired))
Offers an understanding of the advances in the Chemical Vapor Deposition (CVD) process. This book features data on both Plasma CVD and metallo-organic CVD processes. It also explains growing importance of CVD in production of semiconductor and related applications.
506 pages
Media | Books Hardcover Book (Book with hard spine and cover) |
Released | December 31, 1999 |
ISBN13 | 9780815514329 |
Publishers | William Andrew Publishing |
Pages | 506 |
Dimensions | 164 × 237 × 40 mm · 843 g |
Language | English |
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