Plasma Processing of Semiconductors: Proceedings of the Nato Advanced Study Institute, Chateau De Bonas, France, 17-28 June 1996 - Nato Science Series E:

Marc Notes: Published in cooperation with the NATO Scientific Affairs Division.; Includes bibliographical references and index.; Proceedings of the NATO Advanced Study Institute on Plasma Processing of Semiconductors, Chateau de Bonas, France, 17-18-June, 1996--T.p. verso. Table of Contents: Preface. Plasma Etching: Introduction to Plasma Etching; T. D. Mantei. Plasma Chemistry, Basic Processes and PECVD; D. L. Flamm. The Role of Ions in Reactive Ion Etching with Low Density Plasmas; J. W. Coburn. SiO2 Etching in High-Density Plasmas: Differences with Low-Density Plasmas; G. S. Oehrlein. Plasma Deposition: Introduction to Plasma Enhanced Chemical Vapor Deposition; T. S. Cale, et al. Topography Evolution During Semiconductor Processing; T. S. Cale, et al. Deposition of Amorphous Silicon; J. Perrin. Plasma Sources: High Density Sources for Plasma Etching; T. D. Mantei. Resonant Plasma Excitation by Electron Cyclotron Waves - Fundamentals and Applications; H. Oechsner. The Transition from Capacitive to Inductive to Wave Sustained Discharges; R. W. Boswell, et al. Physics of Surface-Wave Discharges; J. Margot, M. Moisan. Plasma-Surface Interactions: Surface Science Aspects of Etching and Wall Reactions in High Density Plasmas; J. W. Coburn. Plasma-Surface Interactions; R. d'Agostino. Cl2 Plasma-Si Surface Interactions in Plasma Etching; V. M. Donnelly, et al. Numerical Modeling: Particle in Cell Monte Carlo Collision Codes (PIC-MCC), Methods and Applications to Plasma Processing; J.-P. Boeuf, A. Merad. Plasma Diagnostics: Optical Diagnostics of Processing Plasmas; P. F. Williams. Optical Diagnostics of Plasmas: A Tool for Process Control; N. Sadeghi, et al. Infrared Absorption Spectroscopy as a Diagnostic for Processing Plasmas; G. M. W. Kroesen. Ellipsometric Analysis of Plasma Deposited and Plasma Etched Materials; J. A. Woollam. Mass Spectrometry of Reactive Plasmas; J. Perrin. Less Conventional Processing Applications of Plasmas: Deposition of Silicon Dioxide Films Using the Helicon Diffusion Reactor for Integrated Optics Applications; R. W. Boswell, et al. Remote Plasma Processing; G. S. Oehrlein. Magnetized Surface-Wave Discharges for Submicrometer Pattern Transfer; J. Margot, et al. Dusty Plasmas: Fundamental Aspects and Industrial Applications; G. M. W. Kroesen. Industrial Application of Plasmas for Processing: Low Energy Plasma Beams for Semiconductor Technology; H. Oechsner. Process Control Concepts; S. Watts Butler. Issues and Solutions for Applying process Control to Semiconductor Manufacturing; S. Watts Butler. Index. Publisher Marketing: Taken from the proceedings of a symposium in France in 1996, this text contains 28 contributions from 18 contributors, and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications."

Contributor Bio:  North Atlantic Treaty Organization Dedication. Preface. Acknowledgments. Clifford Geometric Algebras in Multilinear Algebra and Non-Euclidean Geometries.- Geometric algebra Projective Geometries; Affine and other geometries; Affine Geometry of pseudo-euclidean space; Conformal Geometry and the Horosphere; References. Content-Based Information Retrieval by Group Theoretical Methods.- Introduction; Motivating Examples; General Concept; Fault Tolerance.- Applications, Prototypes, and Test Results; Related Work and Future Research; References.- Four Problems in Radar.-Introduction; Radar Fundamentals; Radar Waveforms; Signal Processing; Space-Time Adaptive Processing; Four Problems in Radar; Conclusions. Introduction to Generalized Classical and Quantum Signal and System Theories on Groups and Hypergroups.-Generalized classical signal/system theory on hypergroups; Generalized quantum signal/system theory on hypergroups; Conclusion; References. Lie Groups and Lie Algebras in Robotics.- Introduction -- Rigid Body Motions; Lie Groups; Finite Screw Motions; Mechanical Joints; Invisible Motion and Gripping; Forward Kinematics; Lie Algebra; The Adjoint Representation; The Exponential Map Derivatives of Exponentials; Jacobians; Concluding Remarks; References. Quantum/Classical Interface: a Geometric Approach from the Classical Side.- Introduction Paravector Space as Spacetime; Eigenspinors; Spin; Dirac Equation; Bell's Theorem; Qubits and Entanglement; Conclusions; References. PONS, Reed-Muller Codes, and Group Algebras.- Introduction; Analytic Theory of One-Dimensional PONS (Welti); Shapiro Sequences, Reed-Muller Codes, and Functional Equations; Group Algebras; Reformulation of Classical PONS; Group Algebra of Classical PONS; GroupAlgebra Convolution; Splitting Sequences; Historical Appendix on PONS; References. Clifford Algebras as a Unified Language.- Introduction; Clifford algebras as models of physical spaces; Clifford Algebras as Models of Perceptual Multicolor Spaces; Hypercomplex-Valued invariants of nD multicolor images; Conclusions; Acknowledgments; References. Recent Progress and Applications in Group FFTs.-Introduction; Finite group FFTs; FFTs for compact groups; Noncompact groups; References. Group Filters and Image Processing.- Introduction: Classical Digital Signal Processing; Abelian Group DSP; Nonabelian Groups; Examples; Group Transforms; Group Filters; Line-like Images; Acknowledgments; References. A Geometric Algebra Approach to Some Problems of Robot Vision.- Introduction; Local Analysis of Multi-dimensional Signals; Knowledge Based Neural Computing; Acknowledgments; References. Group Theory in Radar and Signal Processing.- Introduction; How a Radar Works; Representations; Representations and Radar; Ambiguity Functions; The Wide Band Case; References. Geometry of Paravector Space with Applications to Relativistic Physics.- Clifford Algebras in Physics; Paravector Space as Spacetime; Interpretation; Eigenspinors; Maxwell's Equation; Conclusions; References. A Unified Approach to Fourier-Clifford-Prometheus Transforms- Introduction; New construction of classical and multiparametric Prometheus transforms; PONS associated with Abelian groups; Fast Fourier-Prometheus Transforms; Conclusions; Acknowledgments; References. Fast Color Wavelet Transforms.- Introduction; Color images; Color Wavelet-Haar-Prometheus transforms; Edge detection and compression of color images; Conclusion; Acknowledgments; References. Selected Problems; Various Authors.- Transformations of Euclidean Space and Clifford Geometric; Algebra; References; On the Distribution of Kloosterman Sums on Polynomials over Quaternions; References; Harmonic Sliding Analysis Problems; References; Spectral Analysis under Conditions of Uncertainty; A Canonical Basis for Maximal Tori of the Reductive Centrizer of a Nilpotent Element; References; 6 The Quantum Chaos Conjecture References; Four Problems in Radar; Topic Index; Author IndexContributor Bio:  Williams, Paul Paul Williams is Emeritus Professor of Indian and Tibetan Philosophy and founding co-director of the Centre for Buddhist Studies at the University of Bristol. He is author of Mah y na Buddhism: The Doctrinal Foundations (2nd edition, 2009), The Reflexive Nature of Awareness: A Tibetan Madhyamaka Defence (1998), Altruism and Reality: Studies in the Philosophy of Bodhicary vat ra (1998), The Unexpected Way: On Converting from Buddhism to Catholicism (2001) and Songs of Love, Poems of Sadness: The Erotic Verse of the Sixth Dalai Lama (2004). He is co-author, with Anthony Tribe, of Buddhist Thought: A Complete Introduction to the Indian Tradition, 2nd edition (2012) and was sole editor of the eight-volume series Buddhism: Critical Concepts in Religious Studies (2005).