Stress and Strain Engineering at Nanoscale in Semiconductor Devices - Maiti, Chinmay K. (SOA University Bhubaneswar, Odisha, India) - Books - Taylor & Francis Ltd - 9780367519339 - September 25, 2023
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Stress and Strain Engineering at Nanoscale in Semiconductor Devices

Maiti, Chinmay K. (SOA University Bhubaneswar, Odisha, India)

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Stress and Strain Engineering at Nanoscale in Semiconductor Devices

Based on 3D process and device simulations with mechanical stress simulations by finite element techniques, this book explains performance assessment of nanoscale devices with strained SiGe and other stressors. It explains the process-induced stress transfer and developments at 7nm technology and below node in the area of strain-engineered devices.

260 pages, 23 Tables, black and white; 136 Line drawings, black and white; 3 Halftones, black and wh

Media Books     Paperback Book   (Book with soft cover and glued back)
Released September 25, 2023
ISBN13 9780367519339
Publishers Taylor & Francis Ltd
Pages 260
Dimensions 408 g
Language English  

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