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Rapid Thermal Processing: Science and Technology
Fair
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Rapid Thermal Processing: Science and Technology
Fair
Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.
430 pages
| Media | Books Hardcover Book (Book with hard spine and cover) |
| Released | April 15, 1993 |
| ISBN13 | 9780122476907 |
| Publishers | Elsevier Science Publishing Co Inc |
| Pages | 430 |
| Dimensions | 152 × 229 × 25 mm · 725 g |
| Editor | Fair, Richard B. |
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